ATI – founded in 1996 – is a global leader in the growing field of Metrology and Inspection. ATI specializes in Automated Metrology & Inspection Systems for global manufacturing companies with various applications such as Semiconductors, LED, PCB and the Photo-Voltaic Solar Industry.
SEMICONDUCTOR INSPECTION AND MARKING EQUIPMENT
WIND – Wafer Inspection
Wafer Macro Inspection
- High throughput with dual lens system
- Chip inspection after sawing
- Kerf inspection
- Advanced D2D algorithm using golden die extracted from neighboring 4 dies
- Verifying review module included
- Self-developed lens for wide field of view and good resolution
- Real time auto focusing module adopted
- Optional IR inspection to inspect defects, cracks and chippings inside silicon.
SUN – Mask Inspection
Reticle Macro Inspection
Reticle Macro Inspection
- Particle inspection on all area of reticle: – Pellicle, Pellicle Frame, Pattern, Backside
- Multi scanning with vertical and oblique optical system
- Inspection of various reticles with 1 recipe:
- No prior work for each mask needed
- Applicable to full automation
- 0.5um pinhole/particle detection in non-pattern area
- Optional function to distinguish particle position at top/bottom of pellicle
- Verifying review module included
CYPRESS – Advanced Packaging Inspection
Die attach Inspection
Die attach Inspection
- 2D inspection with good resolution
- 3D height measurement of the attached components
- Multiple handling of various types of packaging
- JEDEC tray, SUS tray, strip, etc.
- IR optics for inspection through silicon
- Optional stage heating
- IR Inspection
LMS-5000/1000 – Laser Markers
- IC Package Substrate Reject Marking / 2D Barcode & Serial No. Marking SysteM
- Reject, 2D barcode and Serial Number Marking at once on Standard Machine.
- Available for Electrolysis / Electroless / OSP Plating Products with ATI Specialized Marking Illumination.
- High Marking Accuracy with 10um Resolution which is the Highest Resolution of Laser Marking Machine.
- Able to Apply CO2, Green and UV Laser Depends on Customer Request.
- Marking Accuracy : ±50um
- Interleaf Handling Function (Optional)
- Sorting Function (Optional)
- 500 Wafer Laser Marking
- 1000 Packaging/PCB Laser Marker
